The Multi-stage Series combines linear motion, rotary motion, and intelligent control technologies to deliver high-precision, high-rigidity multi-axis motion platforms. Flexible configurations across X, Y, Z, θ, and multiple degrees of freedom enable rapid customization and seamless integration into diverse applications. Designed for semiconductor, optoelectronics, precision assembly, inspection, and smart manufacturing, the series delivers reliable, efficient, and precise motion performance for advanced automation.
PHA-series
Designed for silicon photonics and precision optical alignment, the Direct-Drive 6-DoF Alignment Stage delivers high response, long travel, high accuracy, and ultra-low jitter across X, Y, Z, Rx, Ry, and Rz.
Its modular architecture supports flexible axis configurations for PIC, fiber arrays, optical engines, and CPO, enabling fast, stable, and precise active alignment.
XY Theta
The X-Y-Theta Table integrates linear and rotary motion in a compact, low-profile design. Its cable-free structure enables high-speed motion, improved reliability, and longer service life while reducing particle generation. Ideal for semiconductor and precision automation in cleanroom environments.
UF Stage
With an ultra-flat 12 mm profile, the UF Module enables high-density installation and increased throughput. Its direct-drive Z axis delivers fast, smooth, and reliable motion, while the optional Theta axis provides precise rotation. An integrated force sensor enables real-time force monitoring and soft landing. Ideal for multi-head pick-and-place and semiconductor automation.
Z Theta
Designed with a compact Z-Theta architecture, this module integrates vertical and rotary motion for high-density automation. Built-in vacuum routing simplifies connections and supports direct vacuum pick-up. Its direct-drive mechanism delivers fast response, high positioning accuracy, and smooth motion, making it ideal for semiconductor handling, precision pick-and-place, inspection, and advanced packaging.
By using the MOST software to input motion conditions, we can calculate the
corresponding moment of inertia based on combinations of basic shapes,
thereby determining the suitable motor model.
